Articles

Preparation and characterization of porous silica antireflective coating of high environment stability

  • SUN Jinghua ,
  • DING Ruimin ,
  • ZHANG Cong ,
  • ZHANG Ce ,
  • XU Yao
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  • 1. Key Laboratory of Carbon Materials, Institute of Coal Chemistry, Chinese Academy of Sciences, Taiyuan 030001, China;
    2. University of Chinese Academy of Sciences, Beijing 100049, China

Received date: 2014-10-16

  Revised date: 2015-02-09

  Online published: 2015-05-15

Abstract

The porous silica optical antireflective coating is prepared by the sol-gel method with the tetraethoxylsilane as the precursor and the ammonia as the catalyst via a dip-coating process. The environment stability of the antireflective coating could be greatly improved by post-grafting 1H, 1H, 2H, 2H-perfluorodecyltriethoxysilane (FAS-17) and hexamethyldisilazane (HMDS). The properties of the coating are characterized by the UV-VIS spectrometer, the FTIR spectrophotometer, the atomic-force microscopy, the contact angle measurement and the anti-pollution test. The results indicate that for the modified coating, the peak transmittance is up to 99.82%, the surface roughness is only 3.9 nm, and, the contact angle with water is 125°. Especially, the decrease of the transmittance when being tested with water and polydimethylsiloxane pollution in vacuum for two months is as small as 0.03%, suggesting that the coating has an excellent environment stability.

Cite this article

SUN Jinghua , DING Ruimin , ZHANG Cong , ZHANG Ce , XU Yao . Preparation and characterization of porous silica antireflective coating of high environment stability[J]. Science & Technology Review, 2015 , 33(9) : 31 -34 . DOI: 10.3981/j.issn.1000-7857.2015.09.004

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